PIXE (Particle-Induced X-ray Emission) typically uses proton beams of 2–3 MeV, which ionize inner atomic shells and induce the emission of characteristic X-rays from elements in the sample. Detection of X-rays from all elements heavier than sodium (Z > 11) is performed using semiconductor Si(Li) or SDD detectors. Analysis can be carried out in air using an external beam with a diameter of ~1 mm, in a vacuum chamber using a broad beam (1–8 mm), or in an ion microprobe with a beam diameter of approximately 1 micrometer.

RBS (Rutherford Backscattering Spectrometry) is a technique based on the detection of backscattered ions from the incident beam and is used for depth profiling of elements heavier than the beam ions. For example, when using a helium beam, all elements heavier than lithium can be analyzed.

PIGE (Particle-Induced Gamma-ray Emission) typically employs proton beams with energies of a few MeV, which induce nuclear reactions that excite light element nuclei in the sample, leading to gamma-ray emission. Detection is performed using a semiconductor Ge detector, and the method is particularly sensitive to elements such as Li, B, Be, F, Na, etc.

NRA (Nuclear Reaction Analysis) typically uses proton or deuteron beams with energies of a few MeV to induce nuclear reactions that result in the emission of charged particles. Detection is carried out using semiconductor Si detectors, and the method is especially sensitive to light isotopes.

TOF ERDA (Time-of-Flight Elastic Recoil Detection Analysis) is a technique that uses beams of heavier ions to analyze depth profiles of light elements recoiled from the sample surface (typically in the range of 100–500 nm). Commonly used ion beams include Cl, I, and Au.