Field Emission Scanning Electron Microscope (FE SEM) is an analytical instrument that provide the high resolution images of the sample surface by scanning it with a focused beam of electrons.
General instrument information
kapitalna (>1.000.000 kn)
Standalone or bound
Year of manufacture
Ministarstvo znanosti i obrazovanja Republike Hrvatske
Operating and measuring scope
Principle of work
Interaction of a focused electrons beam with the investigated speicmen produce various signals that are used to study the specimen's microtopography and chemical composition. The most frequently secondary electrons are used to obtain the scanning electron images (SEI). The number of emmited econdary electrons depends on the surface morphology of investigated specimens and thus tree-dimensional image of sample surface is created. Signal of backscattered electrons (BSE) can be also used to produce scanning electron image illustrating contrast in the composition in multiphase samples. The principle of EDS analysis (elemental analysis) is that the electron beam generate the X-rays within the specimen. The energy of emitted X-rays is characteristic of the chemical elements present in the sample while the intensity of the energy is proportional to the aboundance of the element in the sample.
Detailed technical characteristics
Working woltage (changable): 500 V - 20 kV Vacuum in sample chamber: 10-5 Pa Minimum working distance (WD): 4 mm Maximum sample size: 12 x 12 x 10 mm ;Schottky Field Emission Cathode High resolution 1.2 nm / 20 kV, 3 nm / 5kV SEI (secundary electron) and BEI (backscatter electron) imiging EDS (Energy Dispersive X-ray) spectrometer (Oxford Instruments
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