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  • Quantitative elemental depth profiling of all elements in the samples (including hydrogen isotopes).
  • Thin films, up to 500 nm thickness, can be analysed with concentration sensitivity of 0.1 atomic percent, and surface depth resolution up to 5 nm. Depth profiles of all elements present in the film can be extracted.
  • The mass resolution of the TOF-ERDA system is 1 amu for the mass up to 40 amu.
  • Heavy ions (Cl, I, Au), with energies up to 40 MeV, are used for the analysis.


Analysis results

2D spectra (Figure 1) from two detector systems (energy and time-of-flight) are collected by SPECTOR v2 data acquisition system. Single element spectra are extracted after the measurements from the 2D maps. Atomic percentages and depth profiles of all elements present in the sample (Figure 2) are evaluated using analysing software.

Figure 1: ToF-ERDA 2D map of thin LSCO film.

Figure 2: Atomic percentages and depth profiles of all elements present in the LSCO film deposited on MgO with 23 MeV I 6+


Sample requirements

Thin film samples with surface roughness less than 10 nm. Sample size is limited to 10×10 mm2. For more info and prices, please, contact

Useful links:

ToF-ERDA method

Time reservation for measurement and analysis



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