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Laboratory for Thin Films

Main laboratory activities are deposition and characterization of thin metallic and semiconductor films made in magnetron sputtering system.Characterization of deposited films is mainly done in cooperation with other laboratories at RBI or various institutes in the country and abroad, including:
  • electrical measurements
  • x-ray structural measurements
  • vibrational spectroscopy (FTIR, Raman)
  • nuclear measurements (ERDA, RBS)
  • mechanical measurements

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